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SEM investigation-material defect of the interface | …
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SEM micrographs of SiO 2 contact hole etch profiles. | Download ...
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Examples of defect SEM images and structures. | Do…
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Simulated images and SEM signals of 30 nm contact holes with 15 nm ...
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Top down SEM images of 45nm c…
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Top down SEM images of 45nm contact hole at defocus positions. Verity ...
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SEM image of defect sample in as received condition. | Download ...
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Examples of each defect type in the SEM dataset. Top row (left to ...
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SEM cross-section image of a front contact and via-hole filled with ...
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(PDF) CD-SEM and E-beam Defect Inspection …
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Contact hole accuracy comparing the square roots between GDS and SEM ...
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(a) SEM micrograph of SiO contact-hole etch profile. P…
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SEM image of small hole machined by cylindrical electrode; a cross ...
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Measurement of hole dimensions using S…
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Damage of around hole of lower panel. a Damage o…
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SEM SEI micrographs (a) of the penetration hole th…
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SEM images of characteristic defect surface features. The arrow in (a ...
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SEM images of holes in diamond: Hole for microflui…
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Contact hole on Active. a) Using semi-rounded Contact hole reci…
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(a) Scummed Contact Hole and Bridged Contact Hole example; (b) Examples ...
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Figture 2. The SEM images of contact holes printed by different types ...
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Geometry of the contact-hole etch profile where t…
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Cross-sectional SEM images of 650 nm conta…
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Cross-section SEM image of release holes. | Downl…
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SEM images of the fabricated t…
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Examples of SEM images of contact holes after etching. (a) When the ...
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