Small angle X-ray scattering, or SAXS, is an experimental method where the intensity of the scattered X-rays is measured as a function of the scattering angle. The information obtained in a SAXS ...
Schematic of a grazing incidence small and wide angle X-ray scattering (GISAXS/GIWAXS) experimental setup showing the incident (αi) and the scattered angles along the horizontal (2θf) and vertical (αf ...
What is X-Ray Scattering? X-ray scattering is a powerful analytical technique used to probe the structure and properties of materials at the nanoscale. It involves directing a beam of X-rays at a ...
A new technical paper titled “Review of the key milestones in the development of critical dimension small angle x-ray scattering at National Institute of Standards and Technology.” “An x-ray ...
A technical paper titled “Inline metrology of high aspect ratio hole tilt and center line shift using small-angle x-ray scattering” was published by researchers at Bruker Nano and Lam Research. “High ...
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